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It's been advised against replacing the tubes with SS because they provide the proper loading to the tube under test whereas a solid state component does not, besides increasing the voltages in the tester, and throwing off the value and calibration.
I'd also caution on spray cleaners/lubes due to the residues they can leave behind, and can conduct and soak into the the wafer material.
I have not done alot in this area of expertise myself but there are some facts out there and besides input from here some research should be in order.
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